1 Electron/Ion Optics
1.1 General ray diagram of TEM
1.2 Electron sources
1.3 Optics
1.4 Detectors
1.5 Ion optics
2 Scanning Electron Microscopy
2.1 Introduction
2.2 Fundamentals of the SEM
2.3 Analytical capabilities of the SEM
3 Transmission Electron Microscopy
3.1 Introduction
3.2 High-resolution transmission electron microscopy imaging
3.3 A new approach to image analysis in HRTEM
3.4 Focal series reconstruction
3.5 Convergent beam electron di®raction
3.6 Lorentz electron microscopy
3.7 Electron holography
4 Scanning Transmission Electron Microscopy (STEM)
4.1 Introduction
4.2 The Principle of reciprocity
4.3 Principle of STEM imaging
4.4 HAADF imaging
4.5 ABF imaging
4.6 Scanning Moir¶e fringe imaging
4.7 Application on micro-area analysis
4.8 Discussion and conclusion
5 Spectroscopy
5.1 Introduction
5.2 Principle of EDS and EELS
5.3 EDS+TEM and EDS+STEM
5.4 EELS-TEM
5.5 EELS-STEM and applications
5.6 Spectrum imaging
6 Aberration Corrected Transmission Electron Microscopy and Its
Applications
6.1 Basics of aberration correction
6.2 Aberration corrected electron microscopy
6.3 Applications of aberration corrected electron microscopy
7 In Situ TEM: Theory and Applications
7.1 In situ TEM observation of deformation-induced structural evolution
at atomic resolution for strained materials
7.2 In situ TEM investigations on Ga/In ¯lled nanotubes
7.3 In situ TEM electrical measurements
7.4 Several advanced electron microscopy methods and their
applications on materials science
8 Helium Ion Microscopy
8.1 Introduction
8.2 Principles¢
8.3 Imaging techniques
8.4 Applications
8.5 Current/Future developments
8.6 Conclusion
Preface
Nanoscale characterization has enabled the discovery of many novel functional materials which started from understanding important relationships between material properties and morphologies. Therefore, nanoscale characterization has become an important research topic in nanoscience. It fosters the foundation for the design of functional nanodevices and applications of these nanomaterials.
The book “Progress in Nanoscale Characterization and Manipulation” is focused on charged-particle optics and microscopy as well as their applications in materials sciences. Prof. Rongming Wang acts as editor-in-chief of this volume. This book involves many cutting-edge theoretical and methodological advances in electron microscopy and microanalysis, testifying their crucial roles in modern materials research. It will be of primary importance to all researcher who work on ultramicroscopy and/or materials research.
While nanomaterials find wider and more significant applications in almost every aspect of modern science and technology, researchers have been trying to gain detailed knowledge of novel materials with atomic (even sub-A) scale resolution that are responsible for their unique properties, including chemical composition, atomic organization, coordinates, valence states, etc. This has been driving the development of ultramicroscopy. This book addresses the growing opportunities in this field and introduces the state-of-the-art charged-particle microscopy techniques. It showcases the recent progress in scanning electron microscopy, transmission electron microscopy and helium ion microscopy including the advanced spectroscopy, spherical-corrected microscopy, focused-ion imaging and in-situ microscopy. To appreciate the synergies of the above-mentioned charged-particle methods, the common features of their optical systems are summarized in the first chapter.
Our authors are active international researchers working at the forefront of the field, while we have received direction and assistance from several senior Chinese scientists (Prof. Hengqiang Ye, Prof. Fanghua Li, Prof. Ze Zhang, Prof. Junen Yao and Prof. Xiaofeng Duan, etc.). Based on their extensive expertise in ultramicroscopy, our authors have provided many their cutting-edge research outputs and demonstrated the indispensable roles of charged-beam microscopy in the development of modern materials research. This defines the unique style of the book: an excellent integration of fundamental theories and practical applications. Therefore, it can meet the needs of a range of readers who are either working on those microscopy techniques or applying them to the investigation of advanced materials. While the development of Cs-corrected microscopy, in-situ microscopy and high-resolution spectroscopy is stepping into a golden age, it is clearly imperative to gain a big picture of the development. The book covers many timely topics and it can serve as a good reference for researchers or students working in many fields such as materials sciences, physics, chemistry, electronics, the semiconductor industry and biology.
We have received numerous constructive suggestions and comments from many colleagues. On behalf of all the editors, I would like to offer our sincere gratitude to those who have contributed to the book.
On behalf of the editors, I would like to thank all our authors. They have been working diligently. I would like to thank my fellow editors for their hard work. I hope this book can facilitate the development of microscopy techniques, inspire young researchers, and make due contributions to the field.
Prof. Rongming Wang
April,2017
本书为中外物理学精品书系中高瞻系列里的一部。是由国内顶级物理学家用英文编写的专著。主要内容是介绍近些年我国在纳米结构表征及其调控研究的最新成果。
王荣明,北京科技大学教授,数理学院院长 。中国材料研究学会青年委员会第四届理事会理事,中国金属学会材料科学分会第五届理事会理事,中国航空学会第六届材料工程专业分会委员。
物质在纳米尺度下表现出的奇异现象和规律将改变相关理论的现有框架,使人们对
物质世界的认识进入到崭新的阶段。在微/纳米尺度对样品进行测量、操控、加工,成
为分> 析和构建新的纳米材料、结构和器件不可或缺的途径。在微、纳米尺度上利用
“自下而> 上(bottom-up)”和“自上而下(top-down)”的微纳加工方法对微纳米材
料、器件等进行微结构表征、操纵、控制、加工等,测量其力、热、光、电、磁等低维
物理特性,开展相关基础理论、方法研究和设备改造、研制,对纳米科技的发展具有重
要的意义。
本书上册主要包括扫描电子显微学、透射电子显微学、聚焦离子束和电子束纳米加
工技术、氦离子显微学等的基础理论,通过一些典型的应用介绍如何运用这些方法实施
对材料及其结构的表征、加工等。